Telecommunication Infrastructure Supporting Business Solutions in the 21st Century / Semiconductor Manufacturing and Inspection Systems

Telecommunication Infrastructure Supporting Business Solutions in the 21st Century

Preface

Special Issue on Telecommunication Infrastructure Supporting Business Solutions in the 21st Century

Masaaki Hayashi

Featured Articles

Platform Architecture for Networked Business

Akihiko Takase, D. Sc. / Susumu Kikuchi

Carrier Network Infrastructure for Integrated Optical and IP Network

Noboru Endo, Ph. D. / Morihito Miyagi / Tatsuo Kanetake, Ph. D. / Akihiko Takase, D. Sc.

Terabit Node for Next-generation IP Networks

Itaru Mimura / Takeki Yazaki / Norihiko Moriwaki

Gigabit Routers for Advanced IP Networks

Naoya Ikeda / Kenji Hayashi / Yoshifumi Atarashi

High-speed Optical Transmission System for Backbone Networks

Kazutaka Sakai / Kagehiro Yamamoto / Kiichirou Taima / Ichirou Ishikawa

Operations Support System Solutions for IP Networks

Masataka Ohta / Fumitoshi Saito / Ken'ya Nishiki / Ken'ichi Yoshida, D. Eng.

IP Network Access System

Shiro Tanabe, D. Eng. / Susumu Matsui / Kazuho Miki / Takaaki Higashi

Next-generation Mobile-access IP Network

Koji Hirayama / Haruo Shibata / Hidenori Inouchi / Tetsuhiko Hirata

Large-scale High-quality Communication Service Soluiton Using Active Network Technology

Takashi Nishikado / Minoru Koizumi / Hideo Oochi

VoIP Solutions for Enterprise Communication Systems

Kazuhisa Tanaka / Shigeaki Kinoshita / Hideyuki Toki / Kouichi Kaneko

Corporate Network System Using VoIP Technology

Jun'ichi Kojima / Masami Ôshita / Kôichi Kaneko / Takashi Maruyama

IP Gateway System for Telecommunication Carriers

Naoki Ema / Seishi Fujishiro / Kouta Funaki

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Semiconductor Manufacturing and Inspection Systems

Preface

Semiconductor Manufacturing and Inspection Systems

Toshihiro Sanematsu

Featured Articles

Semiconductor Manufacturing and Inspection Technologies for the 0.1 µm Process Generation

Takafumi Tokunaga / Katsutaka Kimura / Jun Nakazato / Masaki Nagao, D. Eng.

Electron Beam Mask Writing System for High-precision Reticles
—The HL-900M Series—

Genya Matsuoka / Kazui Mizuno / Tetsuji Nakahara / Hidetoshi Satô

A UHF-ECR Plasma Etcher for Insulation Films

Hironobu Kawahara / Takafumi Tokunaga / Masayuki Kojima / Ken'etsu Yokogawa

Semiconductor Inspection System for Next-generation

Yasutsugu Usami / Seiji Isogai / Isao Kawata

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