Hitachi's Key Technologies Supporting Advanced Devices

Preface

Key Technologies for Advanced Devices

Osamu Nakamura

Featured Articles

R&D Prospects of Organic Electronic Devices

Tadashi Arai, Dr. Eng. / Masayoshi Ishibashi, Dr. Eng. / Masahiro Kawasaki / Takeo Shiba, Dr. Eng.

Layout Design and Lithography Technology for Advanced Devices

Shoji Hotta / Shinji Okazaki, Dr. Eng.

The Challenge to New Metrology World by CD-SEM and Design

Shunsuke Koshihara / Yoshihiro Ota / Hideo Sakai / Ryoichi Matsuoka

"MARORA"—A Plasma Selective-oxidation Apparatus for Metal-gate Devices

Tadashi Terasaki / Masayuki Tomita / Katsuhiko Yamamoto / Unryu Ogawa, Dr. Eng. / Yoshiki Yonamoto, Dr. Sci.

Hitachi's High-end Analytical Electron Microscope: HF-3300

Takeshi Sato, Dr. Sci. / Hiroaki Matsumoto / Mitsuru Konno / Yoshifumi Taniguchi, Dr. Eng. / Shuichi Mamishin

Direct Drive Modular Mounter "GXH-3" Contributing to High Productivity and High Density Placement

Hideaki Fukushima / Yoshinao Usui / Ikuo Takemura / Shigeo Katsuta

One Drop Filling for Liquid Crystal Display Panel Produced from Larger-sized Mother Glass

Akira Hirai / Isao Abe / Masaru Mitsumoto / Shigeru Ishida

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